|
|
Plasma Analytic Solutions |
|
|
|
|
||
¡á Wise Probe Data • Ar+CF4 Varying mix ratio @ 20mTorr • Ar, O2, CF4 @ 10mTorr by Auto Linear Scanner • Measurement with a coating probe ¡á Wise Probe 2D Data • Plasma density @ Ar with various power 100W ¡æ 300W
• Plasma density @ Ar 6 mTorr with various power • Ion Flux @ various Pressure SiH4 ¡á Wise Langmuir Probe |
||
|
133-791 ¼¿ïƯº°½Ã ¼ºµ¿±¸ Çà´çµ¿ 17¹øÁö HIT B107È£ ÇǾؿ¡ÀÌ ¼Ö·ç¼ÇÁî TEL 070-8251-0344 HIT B107, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul, 133-791, KOREA |