Plasma Analytic Solutions

■  Wise Probe Data

       •  Ar+CF4 Varying mix ratio @ 20mTorr

           

      •  Ar, O2, CF4 @ 10mTorr by Auto Linear Scanner

     •  Measurement with a coating probe
        *  In order to diagnose processing plasmas (etching or deposition), we need to coat an insulating layer
             on the probe tip as a protection layer.
         * Comparison with a probe with Al₂O₃ coated (~10um) and a metal probe.
             (Voltage reduction compensation due to the oxide layer impedance.)

              

■  Wise Probe 2D Data

       •  Plasma density @ Ar  with various power  100W → 300W

      •  Plasma density @ Ar 6 mTorr with various power

    •  Ion Flux @ various Pressure SiH4

■  Wise Langmuir Probe

  133-791 서울특별시 성동구 행당동 17번지 HIT B107호  피앤에이 솔루션즈   TEL 070-8251-0344

  HIT B107, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul, 133-791, KOREA